Sub-100-nm precision distance measurement by means of all-fiber photonic microwave mixing


The importance of dimensional metrology has gradually emerged from fundamental research to high-technology industries. In the era of the fourth industrial revolution, absolute distance measurements are required to cope with various applications, such as unmanned vehicles, intelligent robots, and positioning sensors for smart factories. In such cases, the size, weight, power, and cost (SWaP-C) should essentially be restricted. In this paper, sub-100 nm precision distance measurements based on an amplitude-modulated continuous-wave laser (AMCW) with an all-fiber photonic microwave mixing technique is proposed and realized potentially to satisfy SWaP-C requirements. Short and long target distances of 0.879 m and 8.198 m were measured by detecting the phase delay of 15 GHz modulation frequencies. According to our measurement results, the repeatability could reach 43 nm at an average time of 1 s, a result not previously achieved by conventional AMCW laser distance measurement methods. Moreover, the performance by the proposed method in terms of Allan deviation is competitive with most frequency-comb-based absolute distance measurement methods, even with a simple configuration. Because the proposed method has a simple configuration such that it can be easily utilized and demonstrated on a chip-scale platform using CMOS-compatible silicon photonics, it is expected to herald new possibilities, leading to the practical realization of a fully integrated chip-scale LIDAR system.